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Engineers Chart Semiconductors at Atomic Level

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MADISON, Wisc., Aug. 15 -- Spanning fewer than 1000 atoms, the electronic devices on semiconductor chips have become so miniscule they defy most efforts to characterize them. Now, for the first time, engineers have demonstrated a way to image these incredibly small devices by mapping them, atom by atom. In a study published in the Aug. 1 issue of Applied Physics Letters, John Booske, a University of Wisconsin-Madison professor of electrical and computer engineering, and Keith Thompson, David Larson and Tom Kelly of the Madison-based company Imago Scientific Instruments, used Imago's local...Read full article

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    Published: August 2005
    atomsBasic ScienceBooskeboronenergyindustrialLEAPMicroscopyNews & FeaturessemiconductorsSensors & DetectorsThompsonWisconsin

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