MASS SPECTROMETERS
Available from Pfeiffer Vacuum Inc. is the 116-page catalog titled “Mass Spectrometer 05 06 07,” which details instruments such as end-point detectors, ion beam analysis systems, sputter and plasma process monitors, the Prisma residual gas analyzer, the OmniStar for general gas analysis and the ThermoStar for connection to a thermobalance. The publication covers mass spectrometry fundamentals, including how the systems work; mass filter theory; and ion source design. It describes measurements of externally generated ions, such as plasma diagnostics and secondary ion mass spectrometer applications. Pumping options are depicted along with various inlet arrangements that cover a range of applications.
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