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August Technology Corp., a Bloomington, Minn., supplier of advanced macro defect inspection and analysis products for microelectronic industries, was granted a US patent for a method that detects defects on the circumferential edge of a semiconductor wafer. The method takes images along the wafer circumference, then divides them into slices to extract information on a variety of defects -- as many as 30 percent of which originate at the wafer edge. Since this method captures images of a defect in real time, it can preserve the defect size, location, color information and surface morphology of...Read full article

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    Published: November 2005
    August TechnologychemicalsConsumerEpistarinfringementIPG LaserIPG PhotonicslightingLumeraLumiledsNews & FeaturespatentUEC

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