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Excimer Laser Advances Enable High-Performance Flat Panel Displays

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Excimer lasers are key to the low-temperature annealing of polycrystalline silicon for the volume production of flat panel displays. Manufacturers have responded to the needs of this application by developing a new generation of industrial excimer lasers that offer the necessary combination of high pulse energies and high energy stability.

Ludolf Herbst, Coherent GmbH

Many high-performance flat panel displays, including the latest active-matrix organic LED and system-on-panel devices, are based on polycrystalline silicon (“polysilicon”) rather than on the more widely used amorphous silicon. Low-temperature laser annealing is the preferred approach for producing the critical polysilicon layer during fabrication, with excimer laser annealing and sequential lateral solidification being the two established methods. The various electronic components that comprise a flat panel display such as thin-film transistors, are patterned in a layer of...Read full article

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    Published: August 2006
    amorphous siliconConsumerenergyFeaturesflat-panel displaysindustrialpolycrystalline silicon

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