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Device Maker Orders Olympus Inspection System
Nov 2006
Olympus Integrated Technologies America (ITA), a San Jose, Calif.-based subsidiary of Olympus Corp. of Japan, said it has received its fourth order from a US integrated device manufacturer for additional 300-mm wafer inspection and defect review systems and an FR3200 automated defect review system. Its AL3100 system will continue to provide 300-mm macro- and micro-wafer inspection, defect review, wafer ID verification and wafer sorting. The systems perform a variety of inspection and defect review tasks for semiconductor manufacturing processes.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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