Cymer, Nikon Mark Shipment of 1000th Excimer Laser Light Source
Cymer Inc. of San Diego, a supplier of excimer laser light sources used in semiconductor manufacturing, and Japan-based Nikon, a provider of digital imaging, precision optics and photo technology, announced shipment of the 1000th laser light source in the companies’ 20-year partnership. The milestone shipment -- an XLA 300 -- will be integrated on a S610C lithography scanner, which Nikon will use in immersion lithography production to image next-generation integrated circuits. The XLA 300 is Cymer's fourth-generation product built on the Master Oscillator Power Amplifier (MOPA) platform. Since the XL series was introduced in early 2003, more than 360 of the light sources have been shipped, Cymer said.