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Lumonics Delivers Nd:YAG Marking System for Use in Japanese Pilot Plant

Photonics Spectra
Feb 1997
Lumonics Corp. of Oxnard, Calif., has delivered its 300-mm laser marking system to a Japanese silicon supplier. Shin-Etsu Handotni Co. Ltd. is using the WaferMark DSC 300 on its pilot production line to hard mark its 300-mm wafers before etching and polishing. The system employs an Nd:YAG laser to mark 200 wafers per hour. A robotic arm with a dual vacuum wand lifts the wafers to the optical alignment/marking station.

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