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BOC Edwards Donates Dense Fluid Processor to MassNanotech

Photonics.com
Feb 2007
BOC Edwards, a supplier of vacuum, abatement, chemical management equipment and services to semiconductor OEMs and fabs, announced today it has donated a DFP 200 dense fluid processor high-precision advanced wafer chamber system and associated pumps, valves and other components to the MassNanoTech Institute, the University of Massachusetts Amherst’s campus-wide initiative for nanoscale science and engineering. The donation will be used to support the institute's educational and research programs under the auspices of the Center for Hierarchical Manufacturing. One of the institute's goals is to fabricate new nanoscale devices and collaborate with industry in the development of prototypes and new technology. The equipment will assist in its R&D programs on moving nanotechnology from the laboratory to manufacturing, said James Watkins, the institute's director.

GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
abatementBOC Edwardschemical management equipmentDense Fluid ProcessorindustrialMassNanotech InstitutenanoNews BriefsphotonicsPhotonics Tech Briefssemiconductorvacuum

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