Harvard Nanotech Center Orders Plasma-Processing Tools from STS
Surface Technology Systems plc (STS) announced that it has sold two plasma-processing systems to Harvard University in Cambridge, Mass. The inductively coupled plasma (ICP) and plasma-enhanced chemical vapor deposition (PECVD) tools will be installed in the university's Center for Nanoscale Systems (CNS), which focuses on how nanoscale components can be integrated into large and complex interacting systems. Andrew Tucker, GM and vice president of sales, ST Systems (USA) Inc., said, "These are the first tools we have sold to Harvard, and are pleased to add another key university research facility with multiple tools to our customer base." STS provides plasma-based etch and deposition technologies for processing non-mainstream semiconductor devices with applications including telecommunications, MEMS (microelectromechanical systems) and nanotechnology. It is based in Newport, Wales.