Reach Deep into the UV for New Applications
Heinrich Endert, Eric E. Mayer and Michael Kauf, Lambda Physik Inc.
Excimer lasers working at 308, 248 and 193Ynm are well-established tools for high-precision micromachining. However, some new applications are demanding even higher resolution or higher photon energies. One solution that keeps them in the optical range of the electromagnetic spectrum is the F2 laser.