Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Entrepix to Market Rudolph AutoEL Ellipsometers
Nov 2007
Rudolph Technologies, a Flanders, N.J., provider of process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers, has granted Entrepix Inc. an exclusive license to manufacture, sell, service and support its AutoEL series of thin-film ellipsometers. Entrepix is a Tempe, Ariz., provider of chemical mechanical polishing (CMP) process outsourcing and equipment services. The systems, used to measure film thickness, will be labeled “Rudolph Technologies AutoEL — provided and supported by Entrepix." Under the agreement, the transfer of assets and inventory will be completed in the fourth quarter. Entrepix is licensed to market the AutoEL on a global basis (except in Japan) beginning immediately. The first microprocessor-based automated ellipsometer, the AutoEL was has been installed in universities, semiconductor research labs and semiconductor production lines since it was launched in 1977. “The AutoEL technology was the foundation of our overwhelming success in thin-film metrology,” said Paul McLaughlin, chairman and CEO of Rudolph. “We are confident that Entrepix will continue to maintain the high level of support for this product that our customers have expected over the past 30 years.” All inquiries for the AutoEL received by Rudolph will now be redirected to Entrepix.

The science of measurement, particularly of lengths and angles.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
AutoELdata analysisdefect inspectionellipsometersEntripixmetrologyNews BriefsphotonicsPhotonics Tech Briefsprocess control metrologyRudolphRudolph Technologiessemicondcutorthin-film ellipsometer

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.