ASML, Zeiss, Canon to Cross-License Lithography Patents
Lithography systems provider ASML Holding NV (ASML) of Veldhoven, Netherlands, and Carl Zeiss SMT, an Oberkochen, Germany-based maker of optical and electron beam-based inspection and measurement systems, announced they will collaborate with Canon Inc. for the global cross-license of patents in semiconductor lithography and optical components used to manufacture integrated circuits. The agreement means that the companies can market products based on technology covered by the other party’s lithography equipment-related patents. There will be no technology transfer. The companies said in a joint statement that the cross-license will help them compete more freely in their respective areas of technology expertise and implementation, rather than on intellectual property right.
- The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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