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Angstrom Awarded Magnetron Cathode Patent
Feb 2008
Angstrom Sciences Inc. was awarded US Patent No. 7,223,322, involving a moving magnetic/cathode arrangement and its use in magnetron sputtering thin-film deposition. The company, based in Pittsburgh, Pa., holds angstrom.jpgseveral US patents in magnetron design. Sputtering is used to manufacture products such as compact disks, energy-efficient architectural glass, OLED technology, solar panels, flat panel displays and microelectronic devices. Planar magnetron sputtering cathodes with rotating magnetics are primarily used in cluster tools yielding microelectronic materials that require high uniformity. Moving magnetics improve thin-film uniformity on a substrate compared to static magnetron sputtering cathodes, Angstrom said. Combined with its profiled magnet technology, this better uses process target material, and the new moving magnetics can be provided to retrofit existing sputtering systems, the company said.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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