Rudolph Technologies Inc. of Flanders, N.J., has acquired all intellectual property and selected assets from RVSI Inspection LLC of Hauppauge, N.Y. The New Jersey company provides process characterization equipment and software used in wafer processing and semiconductor final manufacturing facilities. The addition of RVSI’s WS-3800 3-D bumped wafer inspection system to its product portfolio is expected to strengthen its presence in the advanced packaging market. The tool complements Rudolph’s NSX 2-D macro defect inspection system. Terms of the transaction were not disclosed.