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Interferometer Investigates MEMS Vibrations

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Two scientists from Helsinki University of Technology in Finland have developed an instrument that probes surface vibrations of frequencies up to 6 GHz, detecting amplitudes down to 1 pm with a lateral resolution better than 1 μm. It measures the absolute amplitude and phase and provides a tool for characterizing surface acoustic wave and bulk acoustic wave low-loss filters as well as microelectromechanical (MEMS) resonators. For the instrument, they used an IntraAction Corp. acousto-optical modulator to split the linearly polarized beam from a single-mode Spectra-Physics HeNe laser,...Read full article

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    Published: April 2008
    detecting amplitudesEuropeEUROResearchmicroelectromechanical (MEMS) resonatorsResearch & TechnologySensors & Detectorssurface vibrations

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