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Moving EUVL From Lab to Fab

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MAUI, Hawaii, June 3, 2008 -- More than 100 leading lithographers will meet in Maui next week to begin developing a plan to speed the introduction of extreme ultraviolet lithography (EUVL) into high-volume semiconductor manufacturing. The effort will take place June 10-12 at the 2008 International Workshop on EUV Lithography, being held at the Wailea Beach Marriott. Keynote speaker will be retired IBM senior scientist Eberhard Spiller, PhD, whom many consider the "father of EUVL" because of his pioneering work on EUVL mirrors. Spiller is owner of Spiller X-Ray Optics in Livermore, Calif., and will speak on "Imaging in...Read full article

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    Published: June 2008
    Glossary
    chip
    1. A localized fracture at the end of a cleaved optical fiber or on a glass surface. 2. An integrated circuit.
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    mask
    1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture tube. 2. In photolithography, a photomask (or mask) is typically a patterned transparent plate or an opaque plate with patterned holes or transparencies that uses a laser light source to transfer and print the pattern by an etching process onto a substrate that is typically a silicon wafer used in integrated circuitry.
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
    plasma
    A gas made up of electrons and ions.
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