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Therma-Wave Wins Order for Metrology Systems

Photonics.com
Mar 1999
FREMONT, Calif., March 15 -- Therma-Wave, Inc. has received an order from the Shipley Co. of Marlborough, Mass., for two Opti-Probe 5000 advanced metrology systems. Shipley will use the systems across its advanced research and production technology areas for the optical characterization of leading-edge 248 nm, 193 nm and next-generation lithography materials.

GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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