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Photonics Spectra
Nov 2008
Semiconductor Equipment and Materials International (SEMI) has published four standards that are applicable to the flat panel display, microelectromechanical systems and semiconductor manufacturing industries. Part of the July 2008 publication schedule, the specifications are for device marking, for liquid crystal display pellicles, for reference position of substrate ID and for microfluidic interfaces to electronic device packages.

BreakthroughMediaflat panel displayindustrialmicroelectromechanical systemsNew MediaSemiconductor Equipment and Materials International (SEMI)

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