Search
Menu
DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

CEA-Leti Project Aims to Improve Sub-28nm Node Yields

Facebook X LinkedIn Email
GRENOBLE, France, April 8, 2010 — CEA-Leti, a global research center committed to creating and commercializing innovation in micro- and nanotechnologies, announced that its Hybrid Metrology Project has developed a way to reduce measurement uncertainty in the sub-28nm nodes. The project has shown results in reducing measurement uncertainty at sub-28nm nodes using an alternative 3D-AFM mode for CD measurement. Known as the deep trench mode, traditionally used for height measurement, it can be extended for certain applications to reach nanometer-scale accuracy of CD measurements employing certain optimized scan parameters....Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: April 2010
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    nanometer
    A unit of length in the metric system equal to 10-9 meters. It formerly was called a millimicron.
    nanotechnology
    The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
    3D-AFMAFMatomic force microscopyBasic ScienceBusinessCD metrologyCD modeCEA-LetiEuropeHigh-Volume Manufacturinghybridhybrid metrologyHybrid Metrology Projectindustrialmetrologymicrotechnologynanonanometernanotechnologynodesplatformresearch centerscan parameterssub-28nm nodesTest & Measurement

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.