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A*STAR Institute, Picosun to Develop ALD

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A*STAR Institute of Microelectronics (IME) of Singapore and Picosun Oy, an Espoo, Finland-based global manufacturer of atomic layer deposition (ALD) equipment, have partnered to develop advanced ALD techniques to enable continued growth in next-generation memories and solar cells. The companies will develop ALD and plasma-enhanced ALD processes for novel dielectrics and metals for applications in resistive switching nonvolatile memories, multilayer metal-insulator-metal capacitors, solar cells and advanced complementary metal oxide semiconductors. Enabling integration of the processes with...Read full article

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    Published: June 2012
    A*STAR Institute of MicroelectronicsALDAsia-Pacificatomic layer depositionBasic ScienceCMOScomplementary metal oxide semiconductorsdielectricsenergyEuro NewsEuropeFinlandIMEindustrialKustaa Poutiainenmultilayer metal-insulator-metal capacitorsNewsPEALDPicosun Oyplasma-enhanced ALDresistive switching nonvolatile memoriesSingaporesolar cells

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