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Ultratech Stepper Orders Cymer Laser
Nov 1999
SAN DIEGO, Nov. 22 -- Cymer Inc. has received an order for its ELX-6500F2 fluorine laser from Ultratech Stepper Inc. of San Jose, Calif. According to Cymer, the fluorine F2 laser is the first 157-nm laser to offer a repetition rate of 1000 Hz, which makes possible the extension of optical lithography for devices with feature sizes below 100 nm.
Ultratech will integrate Cymer's ELX-6500F2 into its small field XLS 157-nm microstepper lithography tool for next-generation lithography process development applications. Cymber expects to ship the laser to Ultratech's facility in Wilmington, Mass. in the first quarter of 2000.

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