DigitalOptics Corp. has ordered multiple systems from wafer processing solutions provider SPTS Technologies to manufacture MEMS-based autofocus actuators for smartphone cameras. The multisystem order from DigitalOptics (DOC) of San Jose, Calif., a wholly owned subsidiary of Tessera, includes SPTS Technologies’ Pegasus Rapier deep silicon etch and Primaxx HF vapor release systems. The Pegasus Rapier system, powered by a patented dual-source configuration to produce uniform plasma density across the wafer, creates high-aspect-ratio features with profile uniformity and low tilt — key contributors to better device yields. Its vapor technology utilizes a “dry” etch environment to ensure stiction-free release of the lens element. DOC’s microelectromechanical systems (MEMS) actuators automatically position lens elements within cameras to provide fast, precise and low-power autofocus on the photo’s subject. Successful production of these devices, micromachined from silicon, relies on the critical performance of the silicon etch module followed by the stiction-free HF vapor release of the micromachined components. “Producing high-performance MEMS autofocus devices requires robust, repeatable and precise manufacturing,” said Dr. Tony Tang, general manager for DigitalOptics MEMS. “The Pegasus Rapier met our demanding profile uniformity and tilt goals at cost-effective throughputs. These attributes are of critical importance as we commercialize our camera modules.” For more information, visit: www.spts.com or www.doc.com