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Gigaphoton EUV Scanner Operates Stably for 24 Hours

OYAMA, Japan — Gigaphoton Inc. said it has achieved continuous operation and stable emission with an extreme-ultraviolet (EUV) light source scanner, a laser-produced plasma light source prototype with an output of 108 W and an average energy stability of 0.5 percent. "Our ability to succeed with continuous...Read full article

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