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Lambda Physik Announces Record Number of Pulses with F1030 Excimer Laser
Nov 2000
FORT LAUDERDALE, Florida, Nov. 7 -- Lambda Physik's NovaLine F1030, 157-nm excimer laser recently achieved 1.1 billion pulses on a single gas fill, said Lambda Physik. The record gas lifetime of 1.1 billion pulses was recorded while the laser was operating in a constant energy mode at a frequency of 1000 Hz, and while emitting output of 11 mJ per pulse. When laser emission was stopped for a new gas fill, the average high voltage was within the factory recommended range, the company said. This performance was achieved on the company's NovaLine laser tube, which demonstrated a lifetime of more than 5 billion pulses by the end of the run.
The NovaLine litho laser was used in experiments at MIT Lincoln Laboratory'sSubmicrometer Technology Group to test optical materials slated to be used in lithography equipment for 157-nm applications.
Lambda Physik manufactures of high-power, pulsed UV and tunable laser sources for lithographic, industrial, scientific and medical applications.

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