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JMAR To Acquire SAL Inc.

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SAN DIEGO, April 19 -- JMAR Technologies Inc. has signed a letter of intent to acquire Vermont-based Semiconductor Advanced Lithography Inc. (SAL), a provider of x-ray lithography (XRL) stepper systems.     SAL's XRL systems can image sub 100 nm circuit patterns. By integrating JMAR's plasma x-ray sources with SAL's x-ray steppers and other supporting technologies, the new JMAR/SAL lithography unit will offer manufacturers of high-speed gallium arsenide (GaAs) semiconductors an XRL processing capability before the end of 2002. The new unit also expects to provide more affordable sub 0.13 µm...Read full article

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    Published: April 2001
    industrialNews & Features

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