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Coherent Debuts All-Solid-State, CW, Deep-UV Laser for Semiconductor Metrology at Semicon West

Photonics Spectra
Jul 2001
Santa Clara, Calif., July 18 -- Coherent Laser Division (CLD) announced that it will introduce the Azure continuous-wave (CW), diode-pumped, deep-ultraviolet (UV) laser at Semicon West in San Francisco, California, July 16-18, at booth #3034. A "hands-free" 266-nm laser source, the Azure has been specifically designed for integration into semiconductor metrology tools.

"The near diffraction-limited beam of the Azure has ultra-low amplitude noise that is characteristic of a single-frequency laser source," said Terry Hannon, senior marketing manager for Coherent Laser Division. "The Azure is a complementary addition to Coherent's CW UV portfolio of products. We offer our customers the widest choice of UV wavelengths and power levels on the market."

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