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A*STAR Institute, Picosun to Develop ALD

EuroPhotonics
Jun 2012
A*STAR Institute of Microelectronics (IME) of Singapore and Picosun Oy, an Espoo, Finland-based global manufacturer of atomic layer deposition (ALD) equipment, have partnered to develop advanced ALD techniques to enable continued growth in next-generation memories and solar cells. The companies will develop ALD and plasma-enhanced ALD processes for novel dielectrics and metals for applications in resistive switching nonvolatile memories, multilayer metal-insulator-metal capacitors, solar cells and advanced complementary metal oxide semiconductors. Enabling integration of the processes with the devices for industrial applications will be the objective of the project. IME bridges research and development between academia and industry.

A*STAR Institute of MicroelectronicsALDAsia-Pacificatomic layer depositionBasic ScienceCMOScomplementary metal oxide semiconductorsdielectricsenergyEuro NewsEuropeFinlandIMEindustrialKustaa Poutiainenmultilayer metal-insulator-metal capacitorsNewsPEALDPicosun Oyplasma-enhanced ALDresistive switching nonvolatile memoriesSingaporesolar cells

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