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Arbor Photonics Wins Fiber Laser Funding

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ANN ARBOR, Mich., Sept. 23, 2010 — Fiber laser solutions provider Arbor Photonics Inc. has received SBIR Phase IB funding from the National Science Foundation for its work on “High Power Pulsed Fiber Lasers for EUV Lithography.”

The supplemental award will support production of its 3CTM (chirally-coupled core) optical fiber to achieve 200 W average power nanosecond lasers in the 1030 to 1090 nm wavelength range with single-mode output. The optical fiber uses an internal structure to produce single spatial mode output from very large core fibers.

Current 3C fibers with 35 µm central core diameters have already produced >100 kW peak power short pulsed output at power levels on the order of 100 W with M2 <1.1. To meet the increased performance goals, current fiber designs will be scaled to at least 50 µm core diameter.

The Phase IB award is an extension of a Phase I design effort that focused on developing high power, single-emitter fiber laser modules with exceptional beam quality and narrow linewidth. The features are anticipated to permit spectral combining of closely spaced laser channels to produce a single beam of nanosecond pulses with an average power of several kilowatts.

The system is intended for use in next generation laser produced plasma extreme ultraviolet lithography.

For more information, visit: www.arborphotonics.com 
Rocky Mountain Instruments - Laser Optics MR

Published: September 2010
Glossary
beam
1. A bundle of light rays that may be parallel, converging or diverging. 2. A concentrated, unidirectional stream of particles. 3. A concentrated, unidirectional flow of electromagnetic waves.
extreme ultraviolet
Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which corresponds to frequencies in the range of approximately 2.5 petahertz to 30 exahertz. This range is shorter in wavelength and higher in frequency compared to the far-ultraviolet and vacuum ultraviolet regions. Key points about EUV include: Source: EUV radiation is produced by extremely hot and energized...
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
optical
Pertaining to optics and the phenomena of light.
optical fiber
Optical fiber is a thin, flexible, transparent strand or filament made of glass or plastic used for transmitting light signals over long distances with minimal loss of signal quality. It serves as a medium for conveying information in the form of light pulses, typically in the realm of telecommunications, networking, and data transmission. The core of an optical fiber is the central region through which light travels. It is surrounded by a cladding layer that has a lower refractive index than...
plasma
A gas made up of electrons and ions.
spatial mode
Also known as transverse mode. The configurations of energy storage, relative to the structure of a laser resonator, that define the relative intensity distribution of the laser beam.
spectral
Pertaining to or as a function of wavelength. Spectral quantities are evaluated at a single wavelength.
ultraviolet
That invisible region of the spectrum just beyond the violet end of the visible region. Wavelengths range from 1 to 400 nm.
wavelength
Electromagnetic energy is transmitted in the form of a sinusoidal wave. The wavelength is the physical distance covered by one cycle of this wave; it is inversely proportional to frequency.
3C fiber3CTMAmericasArbor PhotonicsbeamBusinesscentral corechirally coupled corecore fiberEUVEUV lithographyextreme ultravioletfiber lasersfiber opticsindustriallaser channellithographynanosecondNational Science Foundationopticaloptical fiberOpticsPhase IPhase IBplasmapulsepulsed fiber laserSBIRsingle modespatial modespectralultravioletwavelengthLasers

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