The Atlas Copco Group, a developer of industrial tools, has announced an agreement to acquire the cryogenic business of Brooks Automation Inc. through its wholly owned U.S. entity Edwards Vacuum LLC.

The deal is scheduled for completion in the first quarter of 2019 and aims to expand Edwards’ semiconductor offerings. Brooks Automation, headquartered in Chelmsford, Mass., is a market leader in the provision of advanced cryopumps and associated products for the semiconductor industry through its CTI-Cryogenics and Polycold brands.

The acquisition includes cryopump operations in Chelmsford and Monterrey, Mexico, as well as a worldwide network of sales and service centers. The acquired business will become part of the semiconductor and semiconductor service divisions within Atlas Copco’s vacuum technique business area. Brooks Automation’s 50 percent shareholding of Ulvac Cryogenics Inc. is also part of the deal.

”The acquisition of Brooks Automation’s cryogenic business will help us cement our position as a trusted partner to the world’s leading semiconductor OEMs by enabling the expansion of our current chamber solutions offering through the addition of new technologies and products,” said Paul Rawlings, president of the Atlas’ semiconductor division.