Cabot Microelectronics Corp., supplier of chemical mechanical planarization (CMP) polishing slurries to the semiconductor industry, has opened its global pads manufacturing facility in Aurora, Ill. Cabot Microelectronics offers its Epic D100 polishing pad line, which complements the company’s CMP slurry product offerings. According to the company, the polishing pads business has grown from less than $1 million in revenue for fiscal 2007 to approximately $15 million in revenue for fiscal 2008, ending September 30. Growth in the industry has led to investment in the company’s Aurora facility and the creation 90 new jobs at the company.