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Chip Maker Reorders Axcelis Implanter

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Axcelis Technologies Inc. said today it has received a follow-on order for its Optima HD high-dose ion implanter from an unspecified memory device manufacturer. The system will ship during the second quarter of 2007. The Optima HD uses advanced spot-beam technology and in both conventional high-dose implants and for applications involving 45-nm technology, such as molecular and hydrogen implantation. Axcelis is based in Beverly, Mass.
Apr 2007
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
AxcelisAxcelis TechnologiesBiophotonicshigh-dose ion implantermemory devicesmolecular implantationNews BriefsOptimaphotonicsPhotonics SpectraPhotonics Tech Briefsspot-beam technology

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