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Coherent Debuts All-Solid-State, CW, Deep-UV Laser for Semiconductor Metrology at Semicon West

Photonics.com
Jul 2001

Santa Clara, Calif., July 18 -- Coherent Laser Division (CLD) announced that it will introduce the Azure continuous-wave (CW), diode-pumped, deep-ultraviolet (UV) laser at Semicon West in San Francisco, California, July 16-18, at booth #3034. A "hands-free" 266-nm laser source, the Azure has been specifically designed for integration into semiconductor metrology tools.
"The near diffraction-limited beam of the Azure has ultra-low amplitude noise that is characteristic of a single-frequency laser source," said Terry Hannon, senior marketing manager for Coherent Laser Division. "The Azure is a complementary addition to Coherent's CW UV portfolio of products. We offer our customers the widest choice of UV wavelengths and power levels on the market."

GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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