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Cymer, Nikon Mark Shipment of 1000th Excimer Laser Light Source

Cymer Inc. of San Diego, a supplier of excimer laser light sources used in semiconductor manufacturing, and Japan-based Nikon, a provider of digital imaging, precision optics and photo technology, announced shipment of the 1000th laser light source in the companies’ 20-year partnership. The milestone shipment -- an XLA 300 -- will be integrated on a S610C lithography scanner, which Nikon will use in immersion lithography production to image next-generation integrated circuits. The XLA 300 is Cymer's fourth-generation product built on the Master Oscillator Power Amplifier (MOPA) platform. Since the XL series was introduced in early 2003, more than 360 of the light sources have been shipped, Cymer said.

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Published: December 2006

Glossary

digital: Denoting the use of binary notation; i.e., the representation of data by bits (1 or 0).
excimer laser: An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium used in these lasers. Excimer lasers are widely used in various industrial, medical, and scientific applications due to their ability to deliver high-energy, UV light in short pulses. Key features and characteristics of excimer lasers include: Excimer molecules: The gain medium of an excimer...
image: In optics, an image is the reconstruction of light rays from a source or object when light from that source or object is passed through a system of optics and onto an image forming plane. Light rays passing through an optical system tend to either converge (real image) or diverge (virtual image) to a plane (also called the image plane) in which a visual reproduction of the object is formed. This reconstructed pictorial representation of the object is called an image.
lithography: Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
photonics: The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...

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