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BOC Edwards, a supplier of equipment, materials and services to the microelectronics industry, announced it has formed an alliance with Micell Integrated Systems (MIS) to further develop and market technology for dense and supercritical CO2 semiconductor wafer processing. MIS develops processes and chemical formulations that enable CO2-based process solutions for the semiconductor industry.
Jan 2003
allianceBOC EdwardsmaterialsMicell Integrated Systemsmicroelectronics industryNews BriefsPhotonics Tech Briefs

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