Search
Menu
Gentec Electro-Optics Inc   - Measure With Gentec Accuracy LB

EUV LITHOGRAPHY

Facebook X LinkedIn Email
The 700-page volume EUV Lithography provides comprehensive information on extreme-ultraviolet (EUV) lithography for practitioners and for those needing an introduction to the field. Written by experts in the technology, the resource addresses EUV optics, source technology, wavefront measurement techniques for optical testing, mask and mask metrology, resist technology and system patterning performance. The topic of contamination and its control in EUV lithography scanners also is discussed. Vivek Bakshi, ed.; SPIE Press, Bellingham, Wash.; John Wiley & Sons Inc., Hoboken, N.J., 2009; $89 SPIE members; $105 nonmembers.
Zurich Instruments AG - Boost Your Optics 1-24 MR


Published: June 2009
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
BreakthroughMediaindustrialmetrologyNew MediaSPIEultraviolet (EUV) lithography

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.