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EV Group Partners with SCHOTT on 300-mm Nanoimprint Lithography

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ST. FLORIAN, Austria, Aug. 29, 2019 — EV Group (EVG) has partnered with SCHOTT to demonstrate the readiness of 300-mm nanoimprint lithography (NIL) for high-volume patterning of high-refractive index glass wafers used in the manufacture of waveguides/light guides for next-generation augmented/mixed reality headsets.

The partnership combines EVG’s proprietary SmartNIL process and SCHOTT RealView high-refractive index glass wafers, and will be carried out in EVG’s Austrian facility. SCHOTT will showcase the technology at the China International Optoelectronic Expo (CIOE), to be held Sept. 4-7.

The use of NIL to pattern glass substrates with structures for photonics applications has been limited to 200-mm substrates. This past June, EVG introduced the HERCULES NIL 300mm, which brings SmartNIL into 300-mm manufacturing to support production needs for a variety of devices and applications, including optical devices for AR, MR, and virtual reality headsets, as well as 3D sensors, biomedical devices, nanophotonics, and plasmonics.
Aug 2019
A noncrystalline, inorganic mixture of various metallic oxides fused by heating with glassifiers such as silica, or boric or phosphoric oxides. Common window or bottle glass is a mixture of soda, lime and sand, melted and cast, rolled or blown to shape. Most glasses are transparent in the visible spectrum and up to about 2.5 µm in the infrared, but some are opaque such as natural obsidian; these are, nevertheless, useful as mirror blanks. Traces of some elements such as cobalt, copper and...
Businesspartnershipslithographyglass waferARVRMRsubstratesnanoimprint lithographymaterialsglassaugmented reality

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