Search
Menu
Lumencor Inc. - ZIVA Light Engine 3-24 LB

Electron Beam Lithography Produces Microlenses in Hybrid Sol-Gel

Facebook X LinkedIn Email
In the April 21 issue of Optics Express, scientists at Singapore's Nanyang Technological University discuss the use of a hybrid sol-gel glass to fabricate refractive microlenses with electron beam lithography. According to the researchers, this reduced profile-control problems related to the use of traditional sol-gel, which is extremely sensitive to electron beam exposure.

The hybrid SiO2/TiO2 sol-gel glass has transmittance greater than 95 percent for wavelengths from 362 to 2000 nm. Besides extending optics development across the visible to the near-IR range, it gives scientists the flexibility to tailor polymerized film thickness after development by exposing the hybrid sol-gel film to varying electron dosages. One part fabricated with the material is a 250-µm-diameter microlens with a 2.05-µm sag height. Maximum film thickness produced was 4 µm.
Gentec Electro-Optics Inc   - Measure Your Laser MR

Published: June 2003
industrialNanyang Technological UniversityResearch & TechnologyTech Pulse

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.