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Epion Partners with Marketech
Sep 2005
BILLERICA, Mass., Sept. 9 -- Epion Corp., a commercial developer of gas cluster ion beam (GCIB) systems for microelectronics and related manufacturing, announced plans to market its line of atomic-scale processing equipment in Taiwan via Marketech International Corp., a distribution company for the semiconductor industry in Taiwan.

Under the agreement, which went into effect on Sept. 1, Marketech International will exclusively distribute Epion's nFusion doping system and Ultra-Trimmer corrective etch system in Taiwan. Epion's nFusion processing systems use proprietary infusion technology to produce ultra shallow doping at high throughput. Infusion is a room temperature technique for processing the top few layers of atoms of a surface, while leaving the underlying bulk of the material unaffected. Epion has sold GCIB systems to companies in the US and Japan for enhancement of critical surfaces in devices used for data storage, optics and telecommunications.

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