Fraunhofer Institute for Photonic Microsystems IPMS (Fraunhofer IPMS) scientists have developed high-performance evaluation kits for spatial light modulators that feature tilting or piston mirrors as actuator types. The micromirror element of the developed spatial light modulators manipulate light on a pixel-by-pixel basis, and play a critical role in the generation of high-precision light patterns supporting applications in lithography, medical technology, astronomy, and quantum computing. The scientists' spatial light modulators comprise several million individually analog-controllable mirrors on a single semiconductor chip. These high versatility components form optical key elements for various applications. Depending on the application, the micromirrors can be tilted along one or two axes or lowered horizontally. This enables them to control and manipulate light in its direction, intensity or phase, creating precise light patterns. Fraunhofer IPMS’ spatial light modulator-chip with 256 × 256 micromirrors. Courtesy of Fraunhofer IPMS. To facilitate the transfer of this highly integrated, fast, and precise technology into new applications, Fraunhofer IPMS has begun offering evaluation kits with 64,000 (256 × 256) mirrors. The systems, usually based on one-axis tilt mirrors, have been expanded to include piston mirrors as a new type of actuator. The successful technology implementation into the first version of the evaluation kit allows customers to test a large part of the portfolio of micro mirror arrays on a single, central platform, according to the institute. “Normally, different mirror technologies also require corresponding test systems because the individual mirror arrays are based on individual CMOS backplanes,” said Michael Wagner of Fraunhofer IPMS. “Our kits allow users and developers to test the spatial light modulators on a central platform.” Depending on the mirror type and system setup, the evaluation kits can be used from the ultraviolet spectral range through the visible spectrum up to the near infrared. The researchers are currently working on extending the application range of the evaluation kit to the deep ultraviolet range, as other spatial light modulator platforms from Fraunhofer IPMS are already used within this range. In the ultraviolet range, smaller details can be resolved, allowing detailed and high-precision imaging. The advanced control electronics of the evaluation kit further support very high modulation frequencies up to the kilohertz range. “Typically, the modulation frequency of a micro mirror array is limited by the control setup, not by the properties of the chips themselves. A powerful setup can exploit the full capabilities of the micro mirrors,” said researcher Mario Nitzsche. The evaluation kits achieve high performance through nanometer-accurate calibration of the micromirrors, ensuring precise and high-resolution analog (quasi-continuous) lowering or tilting movement. The complete evaluation kit includes the control electronics, a 64k micro mirror chip (256 x 256 pixels), and the appropriate software. Support for integration and for optimal operation is provided. Fraunhofer IPMS will be showcasing the evaluation kit and their portfolio of spatial light modulators June 24-27 at Laser World of Photonics.