Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn Comments

Gigaphoton, Mitsubishi Develop CO2 Drive Laser

Industrial Photonics
Jan 2014
OYAMA, Japan, Oct. 1, 2013 — Lithography light source manufacturer Gigaphoton Inc. has developed a high-power CO2 drive laser for extreme-ultraviolet (EUV) light sources with Mitsubishi Electric Corp., the company announced Monday. The laser demonstrated an average output level of 15 W, which is sufficient for production and represents another step toward realizing production-level EUV light sources, the companies said.

“This also demonstrates progress towards realizing our vision for a green, environmentally friendly LPP [laser-produced plasma] light source,” said Gigaphoton President and CEO Hitoshi Tomaru. “Our efforts will help to bring the industry closer to realizing EUV lithography scanners for high-volume manufacturing.”

The 15-W EUV light output was confirmed on a prototype EUV light source, the companies said. Initial experiments conducted on the drive laser produced output power of over 20 kW, signifying that a key piece of technology necessary for producing EUV output levels of 250 W — necessary for high-volume manufacturing — has been realized.

For more information, visit: www.gigaphoton.com 


GLOSSARY
photolithography
A lithographic technique using an image produced by photography for printing on a print-nonprint, sectioned surface.
Asia-PacificBusinessBusiness NewsEUV light sourceEUV lithographyGigaphotongreen photonicshigh volume manufacturingHitoshi TomaruindustrialJapanlaser produced plasmalight sourcesLPPMitsubishi Electricphotolithographylasers

Comments
Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x Subscribe to Industrial Photonics magazine - FREE!
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.