Gigaphoton Test KrF Excimer Laser
OYAMA, Japan, Dec. 13, 2016 — Semiconductor lithography light source manufacturer Gigaphoton Inc. has begun testing a new krypton fluoride (KrF) excimer laser, a light source for the annealing process at large-scale liquid crystal display manufacturing plants.
Testing is taking place within a mass production line at a panel manufacturer. Designed to be a high-output KrF excimer laser at 600 W, the product is expected to be an annealing light source for panel manufacturers both within Japan and abroad as demand for large-scale panels with even greater resolutions increases.
Gigaphoton is aiming to ship the first mass-produced models of the KrF excimer laser in the summer of 2017.
Gigaphoton is a developer of excimer laser, extreme UV and lithography light sources.
https://www.photonics.com/Buyers_Guide/Gigaphoton_Inc/c16642