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IQE Silicon Compounds Purchases Aixtron's SiGe Tricent Cluster Tool
Aug 2001
AACHEN, Germany, Aug. 8 -- IQE Silicon Compounds, a provider of epitaxial services to the silicon semiconductor market in Europe, has partnered with Aixtron for the development of specific SiGe epitaxy processes. The company has purchased Aixtron's recently introduced SiGe Tricent cluster tool.

Within this alliance Aixtron will deliver and install the SiGe Tricent Cluster Tool in IQE Silicon Compounds' epi-facility in Cardiff, UK. The cluster tool, equipped with the SiGe Tricent epi module and a wafer-cleaning module, can comprise up to four individual process modules attached to a central wafer handling platform. This architecture enhances the efficiency of the entire SiGe process flow by the integration of pre- and post-epitaxial processes. The reaction chamber of the SiGe Tricent epi Module is optimized for uniformity, efficiency and reproducibility of epitaxial layers on 150, 200 and 300 mm wafers.

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