FT. LAUDERDALE, Fla., April 19 -- Lambda Physik has won multiple orders for its high performance excimer laser systems from Silicon Valley Group (SVG), the manufacturer of automated semiconductor wafer processing equipment. The orders for the NovaLine systems, which operate at a 2 kHz pulse rate, will be delivered in the second calendar quarter of 1999.
The NovaLine K2020 laser is a 30 W (15 mJ/pulse) partially line-narrowed 248 nm (KrF) laser for use with SVG's catadioptric lens design. The NovaLine A2020 is a 20 W (10 mJ/pulse) partially line-narrowed 193 nm (ArF) laser designed specifically for SVG's MICRASCAN 193 nm production systems. Dirk Basting, founder and president of Lambda Physik, commented, We believe we can enable the semiconductor industry to achieve smaller circuit features through the use of our proprietary technology combined with our worldwide customer support.