Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News

Lithography Creates AlGaAs Microdiscs

Facebook Twitter LinkedIn Email Comments
Researchers from the University of Hamburg in Germany have fabricated large periodic arrays of AlGaAs semiconductor microdiscs using laser-interference lithography, reactive-ion etching and selective wet-chemical etching of GaAs with a citric-acid-based solution. Traditionally, microdiscs have been produced by electron-beam or optical lithography with an HF-based etching solution.

High-resolution scanning electron microscope images revealed the high structural quality of the arrays. As reported in the July 22 issue of Applied Physics Letters, the researchers used temperature-dependent photoluminescence spectroscopy to verify that the optical quality of the microsdiscs was comparable to that of existing arrays. Controlling the parameters in the lithography process allowed them to switch from dotlike to antidotlike photoresist patterns, producing microdiscs that are coupled in one or two lateral directions.

Photonics Spectra
Oct 2002
industrialMicroscopyResearch & TechnologyTech Pulse

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.