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Lithography System Order

Vistec Lithography Inc. of Watervliet, N.Y., has announced that AMO GmbH of Aachen, Germany, a nanotechnology research service provider, has placed an order for its EBPG5200 electron beam lithography system. The instrument can generate structures less than 8 nm on varying substrates and part sizes from a few millimeters to 200 mm in diameter. The system incorporates an interactive graphical user interface for ease of use in multiuser environments.

Stanley Electric Co. Ltd. - IR Light Sources 4/24 MR

Published: December 2010

Glossary

lithography: Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
nano: An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
nanotechnology: The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
substrate: A substrate refers to a material or surface upon which another material or process is applied or deposited. In various fields, such as electronics, biology, chemistry, and manufacturing, the term "substrate" is used with specific contexts, but the fundamental definition remains consistent: it is the underlying material or surface that provides a foundation for subsequent processes or applications. Here are some examples of how a substrate is used in different fields: Electronics: In...

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AMO GmbHBusinessEBPG5200electron beam lithographygraphical user interfaceindustriallight speedlithographymillimetermulti-user environmentnanonanotechnologysubstrateVistec Lithography Inc.

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