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Lithography System Selected

Yale University of New Haven, Conn. has selected Vistec Lithography Inc.’s EBPG5000plus electron-beam lithography system for its future nanotechnology research programs. As part of the Yale Institute for Nanoscience and Quantum Engineering, it will encourage multidisciplinary research involving the university’s faculty, students and worldwide research partners. The company, of Watervliet, N.Y., is a provider of electron-beam lithography equipment based on shaped beam technology.

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Published: June 2010

Glossary

beam: 1. A bundle of light rays that may be parallel, converging or diverging. 2. A concentrated, unidirectional stream of particles. 3. A concentrated, unidirectional flow of electromagnetic waves.
electron beam: A stream of electrons emitted by a single source that move in the same direction and at the same speed.
electron-beam lithography system: An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer or even nanometer-scale resolution. EBL systems utilize a focused beam of electrons to directly write patterns onto a substrate coated with a thin layer of electron-sensitive resist material. electron-beam lithography system suppliers → Key components and features of an electron-beam...
lithography: Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
nano: An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
nanotechnology: The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.

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