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MKS Closes On-Line Technologies Acquisition
May 2001
ANDOVER, Mass., May 2 -- MKS Instruments Inc. has closed its acquisition of On-Line Technologies, a supplier of measurement and control products used for gas analysis, wafer metrology and process control. On-Line, based in East Hartford, Conn., designs and manufactures an advanced range of gas analysis and wafer metrology products based on its FTIR spectrometer as well as complementary analysis and control software. This acquisition adds complementary gas-analysis products to the MKS portfolio and adds metrology products to MKS's presence in the advanced semiconductor and optoelectronics markets.

The science of measurement, particularly of lengths and angles.
metrologyNews & Featuresspectroscopy

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