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Nanometrics Buys Soluris

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Nanometrics Inc., a supplier of metrology equipment to the semiconductor industry in Milpitas, Calif., has announced the acquisition of Soluris Inc., an overlay metrology company in Concord, Mass., for $7 million. Soluris was formed in 2003 through a management buyout of assets of the Schlumberger Ltd. semiconductor group. It offers the IVS 155, a tool for 200-mm semiconductor overlay and critical dimension measurement, and intellectual property.
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Published: May 2006
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
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