Onto Innovation Acquires Business Unit from Semilab International
Onto Innovation Inc., a provider of process control and packaging lithography solutions, has entered into a definitive agreement to acquire the materials analysis business of Semilab International. The cash and stock transaction carries a value of ~$545 million.
The acquisition adds four complementary product lines providing inline wafer contamination monitoring and materials interface characterization. Onto Innovation said it plans to integrate its Ai Diffract modeling engine and leverage advanced dimensional metrology, helping speed yield learning for new devices in packaging, power semiconductors and potentially the advanced nodes.
According to Onto Innovation CEO Mike Plisinski, the company sees additional technical synergies between the acquired portfolio and Onto Innovation’s modeling and acoustic metrology technologies. The acquisition is aligned with Onto Innovation’s strategy of targeting high-growth, high-margin segments of the semiconductor value chain, the company said, particularly areas in which device complexity is accelerating, such as the production of chips required for AI applications.
The transaction is expected to close in the second half of 2025 and is subject to U.S. and Hungarian regulatory approvals and customary closing conditions. The deal comes after Onto Innovation acquired Lumina Instruments, Inc., a supplier of optical inspection systems, as well as the lithography business from Kulicke and Soffa Industries, Inc., in separate transactions last year.
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