Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook
More News

Partnership Eyes Deep-UV Photolithography

Facebook Twitter LinkedIn Email Comments
Cymer Inc. and Carl Zeiss Lithos have teamed up to facilitate the development of optical components and modules for lithography light sources. San Diego-based Cymer supplies illumination sources for deep-UV photolithography, and Carl Zeiss Lithos of Germany manufactures optics.

Engineers from both companies will investigate how optics and light sources interact. They also will try to achieve finer resolutions and smaller linewidths to enable further advances in semiconductors in compliance with the Semiconductor Industry Association road map. Zeiss will contribute optics and coatings, while Cymer will continues its development of excimer laser illumination sources.

Photonics Spectra
Jul 1999
Businesscoatingsindustriallight speed

Comments
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.